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Mn and Co co-doped SiC films were fabricated on Si (100) substrates by RF-magnetron sputtering. The lattice structure, composition, chemical valences and photoluminescence of the films were investigated. The lattice structure analysis shows that the films are composed of 3C–SiC and the doped Co atoms form CoSi secondary phase compounds in the films. The analyses of composition and valences display...
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