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Bilayer SnO2–WO3 nanofilm sensors with high sensitivity and selectivity for NH3 gas were developed. The sensitized WO3 nanofilms (5–15nm) were deposited on the top of SnO2 nanofilms without vacuum break via reactive sputtering. The SnO2 nanofilm sensitized with 10-nm-thick WO3 nanofilm exhibited the best performance for sensing NH3 gas. The gas response (Ra/Rg) value of SnO2–WO3 nanofilm sensor to...
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