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Generally, the 3ω method for the measurement of fluid thermal properties is based on an approximate solution to heat conduction model assuming vanishing heater-thickness, no dielectric layer and infinite heater-length. In this study, a novel three-dimensional model and partial differential equations of the dimensionless heating conduction in frequency domain were established, which took into account...
Numerical analysis and analog simulation are used to investigate the FSI (fluid structure interaction) characteristics of a differential pressure flow sensor. The FSI model is created using the hydromechanics and elastic mechanics, and a systematic theory is created to finish the numerical analysis. Then the working mechanism of the flow sensor is analyzed depend on the FSI results. The commercial...
The Micro Electro Mechanical Systems (MEMS) density sensor is developed to achieve in-situ measurement of fluid density rapidly. The sensor's sensitive chip with a rectangular microcantilever is fabricated using MEMS technology. In the sensitive chip, an Au coil and four piezoresistors are fabricated on the rectangular microcantilever. When the sensitive chip is placed in the uniform magnetic field...
A micromachined cantilever-based flow sensor is designed, depending on the detection of surface strain on the cantilever caused by the mass flow. In the continuous flow mode, the deflection of cantilever is directly proportional to the flow rate. The working mechanism of the strain beam in the flow sensor is analyzed, and the finite element method(FEM) is used to investigate the structural deformation...
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