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Magnetic polymer microactuators made of SU-8 and superparamagnetic nanoparticles are reported. Homogenous distribution of nanoparticles in the composite was obtained using superparamagnetic nanoparticles and a surfactant. The magnetic polymer composite (MPC) was micromachined into cantilevers using photolithography. The magnetic characterization of the MPC was performed by a superconducting quantum...
We present a photosensitive polymer composite with superparamagnetic characteristics for the fabrication of microactuators. A uniform distribution of particles in the photosensitive polymer matrix SU-8 is achieved by applying superparamagnetic nanoparticles with the aid of a surfactant. The composite contains Fe3O4 nanoparticles up to 3 vol.% (12 wt.%) with diameters of around 13 nm. Superparamagnetic...
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