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We report an inorganic/organic hybrid barrier that combines the alternating deposition of a layer of ZrO 2 using low temperature atomic layer deposition and a 16-μm-thick layer of UV-curable NOA63 epoxy using spin-coating. The effective water vapor transmission rates of single ZrO 2 film was improved by adding solution epoxy from 3.03×10 −3 g/m 2 day to 1.27×10 ...
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