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Transparent conducting TiO2-doped zinc oxide (ZnO:Ti, TZO) thin films were prepared by radio-frequency magnetron sputtering and followed by plasma treatments with different H2/(H2 + Ar) flow ratio (RH2). The electrical, structural, and optical properties of the TZO thin films were investigated. Experimental results showed that resistivities of all the TZO thin films decreased after plasma treatment...
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