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Fullerene-like hydrogenated carbon (FL-C:H) films were prepared on Si substrates, steel and Si3N4 balls by plasma enhanced chemical vapor deposition with methane gas. The frictional behaviors of steel/FL-C:H, Si3N4/FL-C:H, F-steel/FL-C:H and F-Si3N4/FL-C:H couples were investigated and their worn surfaces were analyzed by scanning electron microscopy (SEM) and 3D surface profiles. The results showed...
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