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The performance of model-based control system depends a lot on the model fidelity. The mismatch between the model and the true plant plays an important role in poor control quality of the closed-loop control system. In this paper, a new statistical online model quality monitoring method for closed-loop systems is presented, which monitors model quality only requiring the real-time routine operation...
The monitoring technique is a key factor to assess the Run-to-Run control performance in semiconductor manufacturing industry. In this paper, a new performance index that is a minimum variance benchmark for the model residuals obtained from closed-loop data is proposed to evaluate the EWMA controller and the process model. Based on the structure of EWMA controller and feedback invariant principle,...
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