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Silicon optical modulators, one of the essential building blocks of silicon photonics technology, have made rapid progress in the last decade and start to show the competitive performances when comparing to traditional LiNbO3 and III–V optical modulators.
We design and fabricate silicon vertical slot waveguides. Ultra-wide bandwidth 1.8-Tbit/s (161 WDM 11.2-Gbit/s OFDM 16-QAM) data transmission through 1-mm, 2mm, 3.1-mm, 12.2-mm-long silicon vertical slot waveguides are demonstrated in the experiment. All 161 WDM channels achieve BER less than 1e-3 after propagating through silicon vertical slot waveguides.
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