The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper presents optical design, proof-of-principle experiments, and post-signal processing for a wafer microcrack detection system. Cylindrical lens and Solid Immersion Lens (SIL) are used for the optical module. Near-field probe array is also investigated for future implementation. For post-signal processing, Probabilistic Neural Network (PNN) is used in order to identify vibration-induced deviation...
This paper presents design and proof-of-principle experiments for a real-time in-line wafer microcrack detection system. The line-scanning method is chosen because entire wafer can be inspected without image processing technology. Short-Time Discrete Wavelet Transform (STDWT) is developed in order to determine reflective characteristics of microcrack, and smaller computation complexity in order to...
A spatial scanning-probe array system for silicon-on-insulator (SOI) integrated circuit is proposed in this paper. The operating fundamentals, specifications, and simulations are presented in this paper. The proposed system is designed to scan the circuit in order to examine the surface and detect die cracks. The post signal processing by using discrete wavelet transform (DWT) for scattered optical...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.