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This paper presents research that uses discrete wavelet transform (DWT) and radial basis neural network for automatic classification. The flow rate of a wet-etching fabrication facility for a single wafer can be analyzed automatically. The electrical signal of a flow meter is collected and decomposed by means of DWT. The signal power of the coefficients processed by the DWT is fed into the radial...
This paper presents discrete wavelet transform (DWT) and short-time fourier transform (STFT) applications for different industrial applications. These two transforms have been compared in different fields, and their implementations are similar. The experiments and simulations show another aspect for both transforms in order to analyze the target information.
This paper presents optical design, proof-of-principle experiments, and post-signal processing for a wafer microcrack detection system. Cylindrical lens and Solid Immersion Lens (SIL) are used for the optical module. Near-field probe array is also investigated for future implementation. For post-signal processing, Probabilistic Neural Network (PNN) is used in order to identify vibration-induced deviation...
This paper presents design and proof-of-principle experiments for a real-time in-line wafer microcrack detection system. The line-scanning method is chosen because entire wafer can be inspected without image processing technology. Short-Time Discrete Wavelet Transform (STDWT) is developed in order to determine reflective characteristics of microcrack, and smaller computation complexity in order to...
A spatial scanning-probe array system for silicon-on-insulator (SOI) integrated circuit is proposed in this paper. The operating fundamentals, specifications, and simulations are presented in this paper. The proposed system is designed to scan the circuit in order to examine the surface and detect die cracks. The post signal processing by using discrete wavelet transform (DWT) for scattered optical...
This paper presents a design and simulation for the voltage sag monitoring technique that intends to apply to multi-point measurement in a power transmission system. The purpose of this research is to fabricate a mixed-signal processing unit especially for power quality monitoring. The system modeling shows the framing discrete wavelet transform proves that the decision making for the voltage monitoring...
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