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In current semiconductor and TFT-LCD factories, periodic sampling is commonly adopted to monitor the stability of manufacturing processes and the quality of products (or workpieces). As for those non-sampled workpieces, their quality is usually monitored by such as a fault-detection-and-classification (FDC) server. However, this method may fail to detect defected products. For example, a workpiece...
The purpose of VM is to enable the manufacturers to conjecture the wafer quality and deduce the causes of defects without performing physical metrology. VM requires a large amount of sensor data retrieved from production tools. However, inappropriateness and instability of the data collection system, which leads to incorrectness, fragment and asynchrony of data collected, may lead to inaccurate conjecture...
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