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In this paper, we report a Sigma-Delta MEMS navigation grade accelerometer, which, to our knowledge, is the first reported MEMS accelerometer to reach navigation grade performances. This reported system encompasses a high stability and high shock resistance mechanical MEMS sensor, a 5th-order sigma-delta closed-loop electronic with digital loop filtering and high stability voltage reference.
Traditional inertial grade accelerometers, based on vibrating quartz structures, which have excellent dynamic range, are vital components in avionics. However, such kinds of accelerometers suffer from high cost and exhibit post-shock stability degradation in particular high-shock, high-vibration environments. MEMS fabrication process is an inherently rugged technology and has great potential to bring...
The paper presents a novel 6th order continuous-time, force-feedback band-pass sigma-delta modulator control system for the detection mode of micromachined vibratory gyroscopes. Compared with the architecture using a low-pass sigma-delta modulator, this band-pass solution uses a much lower sampling frequency for the sigma-delta modulator and thus reduces the requirement for frequency response of the...
The paper presents a novel 6th order continuous-time, force-feedback band-pass sigma-delta modulator control system for the sense mode of micromachined vibratory gyroscopes. Compared with the architecture using a low-pass sigma-delta modulator, this band-pass solution uses a much lower sampling frequency for the sigma-delta modulator and thus reduces the requirement for frequency response of the detection...
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