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The films with various components were prepared by using the reaction gases N2 and O2 combined with the Cr2O3 and CrN targets. The focus of this study is at the composition, optical, and bandgap properties of the CrOxNy thin films. X‐ray diffraction, X‐ray photoelectron spectroscopy, and ultraviolet–visible–near‐infrared (UV‐vis‐NIR) spectroscopy were used to investigate the phase structure, chemical...