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Exponentially weighted moving average (EWMA) is a commonly used model-based algorithm for semiconductor manufacturing process Run-to-Run (R2R) control. However, it's very difficult to set up the mathematical modeling for the actual semiconductor manufacturing process. Therefore, data-based methods such as Recursive Least Squares(RLS) have received wide attention nowadays. This paper proposes a variable...
Semiconductor manufacturing industry has elevated cost in productions. Improvement of production efficiency is always an important goal for manufacturers. Run-to-run control has been widely used in batch manufacturing processes to reduce variations. Threaded exponentially weighted moving average (threaded-EWMA) run-to-run control is an important and stable control scheme. In this paper, we study the...
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