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CrN films deposited by a commercial physical vapour deposition (PVD) process were implanted with Zr ions by metal vapour vacuum arc (MEVVA) implantation at an energy of 40keV and with doses ranging from 6x10 16 to 2x10 17 ion/cm 2 . The films were characterised by glancing incident angle X-ray diffraction (GIXRD), optical microscopy and scanning electron microscopy...
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