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This paper presents a novel 3-DOF precision positioning stage for nanoimprint lithograph (NIL). Due to the advantages such as high positioning accuracy, dexterity, low inertial, and balanced mechanical structure, a piezo-driven flexure-based parallel mechanism is utilized. Based on Pseudo-Rigid-Body modelling theory, the kinematics of the stage is developed by simplifying the single-axis flexure hinges...
The two coplanar elliptic-to-elliptic orbits transfer with two-impulse is considered in this paper. The problem is the rendezvous of two spacecrafts, and the target spacecraft is not fixed in its orbit, but keep moving as same as the tracing spacecraft. To solve the problem, the transfer time is computed using Lambertpsilas theorem and iterative algorithm. And improved genetic algorithm is also used...
This paper presents the closed-form equations for the vibrations of a flexure-based Scott-Russell mechanism driven by a piezoelectric actuator. This mechanism is used for the nano-manipulation. To overcome the displacement limitation of the piezoelectric actuator, the proposed Scott-Russell mechanism is also used to enlarge the working range of the entire system with high positioning accuracy. With...
A high speed precision positioning system is developed through rotary voice coil actuator (VCA) direct driving. By use of finite element analysis (FEA) and dynamic simulation method, the dynamic characteristics of the motion system are investigated, and the magnetism distribution around the VCA has also been acquired. Considering the remnant vibration during the high-frequent starts and stops as well...
Facing IC packaging, a high speed precision positioning x-y table with new elastic decoupling mechanism is developed based on the voice coil actuator (VCA) direct driving. The small moving mass makes it possible that the positioning table moves at high speed and precision. The decoupling theory is expatiated. By use of the FEA and dynamic simulation method, the dynamic characteristics of the high...
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