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Quaternary CrSiCN and ternary CrSiC coatings with various Si concentrations were synthesized on Si(100) wafers via adjusting the flow of (CH3)3SiH (TMS) in precursor gases. The mechanical property and crack resistance of these coatings were evaluated and compared, as well as the influence of Si concentration was investigated. Compared with the CrSiC coatings, the CrSiCN coatings had higher elasticity...
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