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This paper presents the design, fabrication and characterization of a high-fill-factor tip-tilt-piston (TTP) micromirror which employs four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The measured resonant frequencies of the fabricated micromirror are 990 Hz (piston) and 1450 Hz (rotation),...
This paper presents the design and characterization of an electrothermally actuated high-fill-factor tip-tilt-piston (TTP) micromirror and its application to three-dimensional (3D) photoacoustic imaging (PAI). The micromirror chip is 2mm × 2mm. It has large scan range (>25°) at low driving voltage (∼4V) and can perform fast raster scanning. A miniature PAI probe with a diameter of 11.5 mm has been...
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