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In this work, we develop a theoretical explanation for the temperature dependence of the nonlinear amplitude-frequency (A-f) effect in micromechanical resonators. Using this theory, we explain the discrepancy in frequency-temperature (f-T) characteristics between open-loop observation and closed-loop measurements. We show how the temperature dependence of the A-f effect introduces bias voltage dependence...
We report on the first study of fatigue in single crystal silicon MEMS resonators within an extremely clean and controlled environment using the `epi-seal' encapsulation technology. This packaging technology provides a unique opportunity to investigate controversial issues in silicon fatigue since the devices are not exposed to air, oxygen, organics, or other residues that might complicate the initiation...
We develop an efficient characterization method for temperature compensated micromechanical resonators by employing empirical data analysis with an a priori model. We have previously demonstrated that electrostatic-tuning of a composite resonator with an accurate lookup table can achieve a temperature stability of ??3.2 ppm, but this characterization method was not suitable for commercialization since...
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