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We report here design and experimental results on surface-normal optical filters and broadband reflectors based on Fano resonances in patterned single crystalline silicon nanomembranes (SiNM). Patterned SiNM structures were fabricated and transferred onto transparent glass substrates, using a direct wet transfer process. The measured transmission results agree well with the designs for the filter...
We report here the design and experimental results on surface-normal optical filters based on Fano resonance in patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent glass substrates using a disruptive SiNM wet transfer process. The measured filter transmission results agree well with the design. Further design and process optimizations can...
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