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Aluminum rich zinc oxide (AZO) film was made on silicon substrates by spin coating using a precursor containing Al and Zn in the 20% atomic ratio. The films were annealed in air atmosphere and in hydrogen ambient. The minimum reflectance (R λ ) in air annealed (AZO:Air) samples was ∼2.5% in the vicinity (±50nm) of 750nm, however, the value was marginally lower (∼2%) in hydrogen annealed (AZO:H...
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