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We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 μm and a thickness of 2.5 μm is suspended by four sensing beams with integrated p-type piezoresistors, composing a full Wheatstone bridge. The membrane...
This paper presents a new fabrication method to manufacture alkali reference cells having dimensions larger than standard micromachined cells and smaller than glass-blown ones. This technology fills a gap in cell sizes and already available technologies.
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