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Due to scale effects, the releasing of micro objects has been a long-standing challenge in micromanipulation applications. In this paper a micromanipulation system is presented based on the adhesion control with compound vibration. This adhesion control technique employs inertia force to overcome adhesion force achieving 100% repeatability with releasing accuracy of 4±0.5μm, which was experimentally...
Due to scale effects, the reliable pick-and-place manipulation of micro objects has been still a long-standing challenge in scientific and technological field. This paper presents an active method to manipulate microobjects, which employs inertia force and compound vibration to overcome adhesion forces. The compound vibration comes from electrostatic actuator and piezoelectrically driven microactuator...
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