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Y. C. Ding, J. Y. Shao, and co‐workers demonstrate a creative and economic method for manufacturing large‐area microlens arrays (MLAs) with controllable curvature and supersmooth surfaces. On page OP 165, the production of a concave MLA is achieved by electrohydrodynamically deforming the surface of a photocurable prepolymer trapped in microhole array which has been etched onto a doped silicon wafer...
The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well‐controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large‐area and high‐quality MLAs or MMAs economically.
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