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MnSi nanoparticles on silica are prepared by metal‐organic (MO)CVD of Mn(CO)5SiCl3 as a single‐source precursor. Mn(CO)5SiCl3 is synthesized from Mn2(CO)10 and SiHCl3 using standard Schlenk techniques, and confirmed by Fourier transform infrared (FTIR), single‐crystal X‐ray diffraction (XRD), and 13C and 29Si nuclear magnetic resonance (NMR). Powder XRD patterns, high resolution transmission electron...
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