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We present a comparative microscopic and spectroscopic study of the morphology and composition of WO3 and W0.95Ti0.05O3 thin films, grown by radio-frequency magnetron reactive sputtering at substrate temperatures varied from room temperature to 500 °C, using atomic force microscopy (AFM), Raman spectroscopy, and X-ray photoelectron spectroscopy (XPS). With increasing growth temperature, the AFM results...
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