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In this paper, tricobalt tetraoxide (Co3O4) catalyst was coated on the polydimethylsiloxane microchannel by the plasma-enhanced metal-organic chemical vapor deposition technology. The obtained Co3O4 film was characterized by SEM, XRD, XPS, and TEM, and the results show that the as-deposited Co3O4 film was initially composed of many cauliflowers-shaped microclusters. Also, the microcauliflower was...
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