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Summary form only given. RF APGD (atmospheric pressure glow discharge) is nonequilibrium plasma and low temperature plasma. This plasma source is of interest for the deposition of materials because low temperature deposition without a vacuum system is possible. Moreover, remote plasma deposition process using atmospheric pressure plasma jet has some advantages due to suppression of ion bombardment...
Summary form only given. Planar dielectric barrier discharges (DBDs) have a large number of industrial applications because of simple structure and no need for cumbersome impedance matching systems. However, planar DBD still have some disadvantages such as the limit of gap distance and the non-uniformity due to the characteristics of microdischarge intercepting electrodes. Therefore the DBD jet has...
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