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Control of the density, composition, ionisation rate and arrival energy of species is one of the main objectives of research in the development of reactive magnetron sputtering. The deposition of the latest generation of multilayer and multi-component coatings requires the independent control of deposited flux parameters using fast response and reliable control systems. A review of recent advances...
A saddle field cold cathode source was used to produce diamond-like carbon (DLC) coatings on glass substrates by dissociation and ionisation of acetylene in a low pressure vacuum. Langmuir probe investigations of the ion current density and plasma potentials showed the existence of a positive potential barrier at a distance of 100 mm from the source with an ionisation degree of up to 80% in the carbon...
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