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ZnO films thin films have been deposited on glass and three different LiNbO 3 (LNO) substrates at room temperature using radio frequency magnetron sputtering. The structure and optical properties of the films were investigated by X-ray diffraction (XRD), optical transmission spectroscopy and spectro-photometry. XRD analysis shows that all the films are hexagonal wurtzite structure, and there...
The effect of annealing on structural, electrical, and optical properties of Ga-doped ZnO (GZO) films prepared by RF magnetron sputtering was investigated in air and nitrogen. GZO films are polycrystalline with a preferred 002 orientation. The resistivities of annealed films are larger than the as-deposited. The transmittance in the near IR region increases greatly and the optical band gap decreases...
High quality In-doped ZnO (ZnO:In) thin films were deposited on the quartz glass substrates at room temperature by using radio frequency magnetron sputtering. The effect of annealing temperature on the structure and optical properties of the ZnO:In films was investigated. It was found that the as-deposited film has a hexagonal wurtzite structure with c-axis perpendicular to the substrate. Accompanying...
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