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In this experiment, [100]. [110] and [111] single crystal silicon wafers were interrogated by line focused ultrasonic transducer with large aperture. Lamb waves generated in the wafers were detected by same transducer, and the rf signals, V (t, z) were acquired as varying defocusing distance. Since Lamb wave is dispersive, a numerous modes were mixed in the detected rf signal. A series of signal processing...
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