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Inductively coupled plasmas (ICP) employing linear antennas have gained a great deal of interests recently for applications in large area plasma processing tools. On the other hand, plasma sources operated in pulsed mode are also very attractive since they allow a wider range of tunability of relative concentration of reactive species and/or plasma uniformity. In this work, we experimentally characterized...
Measurement of plasma density, a key parameter that control the property of processing plasmas and hence the processing results, has been the focus of extensive studies in recent years, not only for characterization of the plasmas but also for development of tools for monitoring of the plasma based processes1.Inthis study, a miniature Plasma Absorption probe (mini-PAP)[2] of outer diameter 0.9 mm,...
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