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Limited by the current MEMS fabrication technology, full symmetry of the left and right parts of a dual-mass silicon micro-gyroscope is not achievable. Based on the characteristics of the dual-mass structure, a two degree-of-freedom viscous-damping vibration system model was established for the micro-gyroscope. Harmonic response analysis of the vibration system was implemented then, based on which...
This paper deal with a new symmetrical and Decoupled Silicon Micro-Gyroscope (DSMG). By the simplified motion model of the DSMG, the mechanical coupling error from the width errors of suspension beams is analyzed and deduced. The simulation shows that the simulated results of mechanical coupling error basically equal to the calculation results. The characterization test results of the DSMG show that...
The performance of silicon micro-gyroscope (SMG) is influenced deeply by quadrature error and offset error. The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are enduced. In order to eliminate the effects of the quadrature error and offset error, as well as the inherent non- linearity in the capacitance-type sensors, a...
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