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Limited by the current MEMS fabrication technology, full symmetry of the left and right parts of a dual-mass silicon micro-gyroscope is not achievable. Based on the characteristics of the dual-mass structure, a two degree-of-freedom viscous-damping vibration system model was established for the micro-gyroscope. Harmonic response analysis of the vibration system was implemented then, based on which...
The dual-mass double-linear vibrational gyroscopes are insensitive to the environment, and their differential outputs can effectively suppress the common mode interference. A structure-decoupled dual-mass MEMS(micro-electro-mechanical system) gyroscope is studied in this paper, which can realize the full decoupling of the driving mode and sensing mode. In order to improve the performance of the dual-mass...
This paper deal with a new symmetrical and Decoupled Silicon Micro-Gyroscope (DSMG). By the simplified motion model of the DSMG, the mechanical coupling error from the width errors of suspension beams is analyzed and deduced. The simulation shows that the simulated results of mechanical coupling error basically equal to the calculation results. The characterization test results of the DSMG show that...
A micromachined vibratory gyroscope with two proof-masses to measure rotation rate is presented. The two proof-masses are driven electrostatically in opposite directions along drive axis to generate differential Coriolis force detection. In order to improve the performance of the MEMS gyroscope, an adaptive control method is developed. This scheme tunes the drive natural frequencies of gyroscope to...
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