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High-electron-mobility transistors (HEMTs) with a highly resistive two-layer buffer layer (AlGaN/GaN) were grown on 6H-SiC substrates by metalorganic chemical vapor deposition. The characteristics were compared with those of conventional HEMTs utilizing GaN as the high-resistivity buffer. The results of x-ray diffraction and atomic force microscopy indicate that the crystal quality of the HEMT heterostructure...
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