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Room-temperature-deposited FePt thin films with thickness ranged from 5 to 100 nm treated by rapid-thermal annealing (RTA) were studied. With annealing condition of 900C for 60 seconds at heating rate of 80 C/sec., a metastable phase of FePt was observed in the films with nm. The phase is chemically ordered with a face-centered-cubic (fcc) structure. The lattice parameter...
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