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In this work, we present a comprehensive study on the hydrogen impurity depth profiles in InN films with polar c‐plane and nonpolar a‐plane surface orientations in relation to their structural and free‐electron properties. We find that the as‐grown nonpolar films exhibit generally higher bulk and near‐surface H concentrations compared to the polar InN counterparts. The latter may be partly associated...
In this work we present a comprehensive study on the hydrogen impurities, free electron, and structural properties of MOVPE InN films with state‐of‐the‐art quality. We find a correlation between the decrease of free electron concentration and the reduction of bulk hydrogen in the films upon thermal annealing, while no changes in the dislocation densities and strain are observed. Our results suggest...
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