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Limited travel constrains the widely application of XYZ parallel micro/nano-positioning stage. In this paper, a novel parallel-kinematics micro/nano-positioning stage is proposed with the goal of enlarging the travel range. In order to obtain a large input displacement for actuating the stage, voice coil motors (VCM) are adopted. For a large-travel parallel stage, the cross-axis motion increases the...
This paper presents the mechanical design of a novel 3-PSS (P and S represent the prismatic and spherical joints, respectively) parallel-kinematic flexure nanopositioning stage. This stage provides a high-precision motion driven by three piezoelectric actuators. By employing the compound displacement amplifier and 3-PSS parallel mechanism, the flexure nanopositioning stage can deliver two rotational...
This paper presents the design of a flexure-based precision positioning micro-motion stage system with constant output force. The stage mechanism is devised using folded leaf flexure (FLF) to achieve positive-stiffness structure. Bistable beams are employed to design negative-stiffness structure by using their buckling characteristics. Two bistable beams and two FLFs are combined together as a zero-stiffness...
This paper presents the design, analysis, fabrication, and experimental testing of a two-axis micro-motion machine dedicated to precision alignment applications. The designed machine features a long alignment distance over ±5 mm in each axis and a well decoupling motion in the two axes. The design is devised using metal flexure mechanisms based on multistage leaf spring, which allows a precise movement...
This paper presents the design, modeling, and experimental testing of a flexure-based compliant rotary micropositioning stage with a large rotational range. The rotary stage is devised based on multistage compound radial flexures. One uniqueness lies in that it owns both a compact size and a large rotary stroke. Dominant parameters of the stage are determined based on established analytical models...
The design and evaluation of a new compliant microgripper is reported in this paper on the basis of a dissymmetric mechanism. This structure has two parallelogram mechanisms which enable the generation of purely translational motion of the gripper tips. It is desirable for micromanipulation and microassembly tasks. Unlike the traditional pure-translation grippers, the presented one has a simple architecture...
Micropositioning systems with the properties of long travel range, compact physical size and high accuracy are required in many precision engineering applications. This paper presents the design, fabrication and testing of a novel two-axis compliant parallel-kinematics precision positioning stage with a centimeter stroke and compact size. Different from existing work, the presented stage owns a much...
This paper presents the design and fabrication process of a new piezoelectrically actuated flexure-based XYZ compliant parallel-kinematics micropositioning stage with totally decoupled properties. The proposed XYZ stage consists of three limbs which are assembled in an orthogonal manner, and it has both input and output decoupling properties. Analytical models for kinematics, statics, and dynamics...
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