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The major emissive probe techniques for the measurement of vacuum space potentials are compared to find the best emissive probe method in a vacuum. An overview of the inflection point method, the floating point method, and the vacuum current bias method is given, addressing how each method works in a vacuum. A comparison of the experimental data measured in a vacuum shows that the improved inflection...
A complete floating double probe technique is used to measure the ion density and electron temperature in a dual frequency capacitively coupled plasma for argon discharges. It has been shown that there is an obvious modulating effect of the high- and low-frequency powers on the plasma parameters and their spatial distributions. In addition, the influence of the discharge gap on the ion density and...
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