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We fabricated five different types of a-SiGe:H and nc-Si:H based multi-junction solar cell structures using modified very high frequency (MVHF) technology. After optimization, all five structures reached similar initial cell performance, i.e. ~12% small active-area (0.25 cm2) efficiency and 10.6-10.8% large aperture-area (?? 400 cm2) efficiency after encapsulation. However, they showed quite different...
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