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This article presents the design and experimental implementation of an observer-based model predictive control (OMPC) scheme with a notch filter which aims to compensate for the effects of creep, hysteresis, cross-coupling, and vibration in piezoactuators in order to improve the nanopositioning of an atomic force microscope (AFM). The controller design is based on an identified model of the piezoelectric...
Tracking a reference signal is one of the major problems of an atomic force microscope (AFM). This article presents the design and experimental implementation of a model predictive control (MPC) scheme, with a vibration compensator for achieving accurate tracking for an AFM at higher scanning rates. To evaluate the improvement in performance attained by this control scheme, an experimental comparison...
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