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We present a 3-D surface profiling method for microlenses that utilizes a Shack–Hartmann wavefront sensor. This method applies to both solid microlenses and liquid–liquid interfaces in liquid microlenses. The wavefront at the aperture stop of a microlens is measured by a Shack–Hartmann wavefront sensor and is then used to calculate the 3-D surface profile of the microlens. Three types of microlenses—a...
We report on the characterization of microlenses utilizing the three-dimensional (3D) surface profile obtained from a Shack-Hartmann wavefront sensor. This method can be applied to most types of microlenses, especially liquid ones. Both a solid and a liquid microlens were characterized. The surface data was analyzed and then exported into Zemax to compute their optical properties. The wavefront error...
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