The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A 2-D simulation system based on a 2-D dynamic cellular automata method, integrating aerial image simulation, exposure simulation, post-exposure bake simulation, and development simulation modules is presented for inclined ultraviolet (UV) lithography processes of thick photoresists such as SU-8 photoresists. To verify the simulation system, a series of experiments have been performed for SU-8 2000...
A two-dimensional (2D) simulation system is developed for the ultraviolet (UV) lithography process of thick SU-8. A series of simulations and experiments have been conducted to verify the simulation system and to study the effects of different lithography parameters on the line width deviations and sidewall profiles of the SU-8 microstructures. All studies are carried out on SU-8 2075 layers under...
The objective of this paper is to investigate and confirm the critical success factors for e-business implementation from the e-business process perspective. We develop a critical success factors (CSFs) framework which is composed of six constructs. It is applied to investigate and confirm the CSFs in three traditional e-business processes (e-procurement, e-ordering and CRM). From a survey of 34 enterprises...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.