The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Photolithography plays a vital role in micromachining process however; coating a thin and uniform resist layer on a non-planar surface is a challenging task for micro-electro-mechanical system (MEMS). Conventional spin coating of photoresist (PR) over an un-even surface would deliver streaks all over the wafer surface. Spray coating of PR is a promising technique when compared to other candidates...
This paper presents a comparative study on p- and n-channel MOSFET embedded current mirror integrated pressure sensing structures. The pressure sensing structure consists of three MOSFETs connected in a resistive loaded current mirror configuration. The input constant current source MOSFET of the current mirror acts as a reference transistor and the output MOSFETs are the strain sensing elements....
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.