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With the rapid development of electronic technology, semiconductor section resistivity measurement is receiving increasing attention. This paper applies electrical impedance tomography (EIT) technology to semiconductor resistivity measurements. FEM is applied to solve the EIT forward problem. Mathematical description of partial differential equation, equivalent variation differential problem, element...
To measure the resistivity distribution of semiconductor wafers, this article applies electrical impedance tomography (EIT) technology to semiconductor resistivity measurements. A new method of Image reconstruction algorithm based on RBF neural network for EIT is proposed. The particle swarm optimization algorithm (PSO) is designed to optimize the RBF network's connection weights. The simulation experiment...
A new method for static electrical impedance tomography was proposed in this paper. The new algorithm was based on the weight adjustments of error back propagation of BP neural network whose weights and thresholds were modified by improved particle swarm optimization. This method can not only well adapt to non-linear and ill-posed characteristics of electrical impedance tomography, but also overcome...
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