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This paper presents a new structure for three-state RF MEMS switches with a true mechanical latching mechanism by using U-shaped electro-thermal actuators. This latching mechanism keeps the switch in any of three different states without any power consumption. The mechanism overcomes the high power consumption problem of the thermal actuators. Consequently, the switch consumes power while its transition...
A new electro-thermally driven high Q tunable RF MEMS capacitor is proposed in this paper. The tuning mechanism of the varactor is chosen to obtain tuning; hence the capacitor has linear tuning range. In order to satisfy the low voltage operation of the varactor electro-thermal actuators were chosen as the drive and latching mechanism. However, those actuators consume lots of power, accordingly, in...
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