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Reflectance anisotropy spectroscopy (RAS) has been applied to study the oxidation of decapped InAs(001) surfaces at room temperature. (2x4) and (4x2) surfaces were prepared in ultra high vacuum by annealing, and then exposed to increasing amounts of molecular oxygen. During exposure to gas, RAS spectral structures at 2.4 eV in (2x4) and at 1.7 eV in (4x2) are progressively reduced. After about 1x10...
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