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A low-cost ultra-thin broadband terahertz beam-splitter based on a thin conductive layer has previously been fabricated and tested. Here, this paper shows the linearity of power scaling of the beam-splitter from lower to higher power in typical terahertz time-domain spectroscopy systems. The presented results consider multiple samples of differing thicknesses.
We present here a new surface-micromachined, all-parylene (para-xylylene), in-channel, normally-closed pop-up checkvalve with a designable cracking pressure. The cracking pressure is created by the mechanical residual tensile stress introduced by a popping mechanism. Moreover, an even higher cracking pressure can be achieved by thermal annealing before popping, which adds another degree of freedom...
This paper studies the dynamic response of silicon bulk acoustic mode resonators spotted with water droplets of varying volume on the top surface. Three different cases were compared: (i) bare silicon resonators, (ii) parylene C coated resonators and (iii) hydrophobic self assembled monolayer coated resonators. Experimentally derived variations in quality factor are compared with those obtained analytically...
One of the smallest Joule Thomson (J-T) micro cryogenic coolers (MCC) utilizing a hollow-core fiber-based heat exchanger (HX) is designed, fabricated, assembled and tested. Techniques that control mask material etching are developed to fabricate a multi-layer silicon structure on HX-coupling manifolds. A segmental metal coating is applied on the fibers and the capillary for solderable areas and reduced...
The barrier properties of silicon nitride films prepared by plasma-enhanced chemical vapor deposition (PECVD) against moisture penetration were studied, with emphasis on the correlation of deposition parameters and moisture permeation rate. The moisture resistance of films have been characterized using infrared spectroscopy and determination of water vapor permeation (WVP) rate. Our results indicate...
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