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An adjustable, variable-focus fluidic lens is typically utilizing curvature change in the meniscus between two immiscible liquids or by adjusting the liquid pressure of the lens chamber. In addition, this curvature change can be used as a deformable mirror to correct the aberrations such as defocus and astigmatism. In this paper, we first fabricate a liquid lens prototype and experimentally characterize...
MEMS Lamb wave ultrasonic devices have been shown to be extremely useful for applications of sensor, actuator, resonator, and so on. This paper presents the design and fabrication of Lamb wave microdevice based on ZnO piezoelectric film. The Lamb waves were respectively launched and received by both Al interdigital transducers deposited on ZnO/Al/LTO/Si3N4/Si thin piezoelectric composite plate. The...
A numerical analytical method based on multi-mode Galerkin discretization is presented to investigate the nonlinear response of the clamped-clamped microbeam of the MEMS capacitive switch under the different mechanical shock loads. The results show that using five or more modes can be sufficient to capture the nonlinear dynamic response of clamped-clamped microbeam, and the microbeam experiences a...
The MEMS capacitive switch based on fixed-fixed microbeam have garnered significant attention due to their geometric simplicity and broad applicability, and the accurate models should be developed to predict their electromechanical behaviors. The improved macromodel of the fixed-fixed microbeam of MEMS capacitive switch is presented in this paper, the numerical analysis of mechanical characterizations...
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